VLSI metallization
by
 
Einspruch, Norman G.

Title
: 
VLSI metallization

Author
: 
Einspruch, Norman G.

ISBN
: 
9781483217819

Publication Information
: 
Orlando : Academic Press, 1987.

Physical Description
: 
1 online resource (x, 480 pages) : illustrations

Series
: 
VLSI electronics ; v. 15
 
VLSI electronics ; v. 15.

Subject Term
: 
Integrated circuits -- Very large scale integration -- Design and construction.
 
Metallic films.
 
Metallizing.
 
TECHNOLOGY & ENGINEERING -- Mechanical.
 
Integrated circuits -- Very large scale integration -- Design and construction. (OCoLC)fst00975610
 
Metallic films. (OCoLC)fst01017885
 
Metallizing. (OCoLC)fst01017914

Genre
: 
Electronic books.

Added Author
: 
Einspruch, Norman G.
 
Cohen, Simon S.
 
Gildenblat, Gennady Sh.

Electronic Access
: 
ScienceDirect https://www.sciencedirect.com/science/book/9780122341151
 
ScienceDirect https://www.sciencedirect.com/science/bookseries/07367031/15


Shelf NumberItem BarcodeShelf LocationShelf LocationHolding Information
TK7874 .V56 VOL. 151183705-1001Elsevier E-Book CollectionsElsevier E-Book Collections