Lithography for VLSI
by
 
Einspruch, Norman G.

Title
: 
Lithography for VLSI

Author
: 
Einspruch, Norman G.

ISBN
: 
9781483217826

Publication Information
: 
Orlando : Academic Press, 1987.

Physical Description
: 
1 online resource (xi, 361 pages) : illustrations

Series
: 
VLSI electronics ; v. 16
 
VLSI electronics ; v. 16.

Subject Term
: 
Integrated circuits -- Very large scale integration.
 
Printed circuits.
 
Lithography.
 
TECHNOLOGY & ENGINEERING -- Mechanical.
 
Integrated circuits -- Very large scale integration. (OCoLC)fst00975602
 
Lithography. (OCoLC)fst01000265
 
Printed circuits. (OCoLC)fst01076537

Genre
: 
Electronic books.

Added Author
: 
Einspruch, Norman G.
 
Watts, R. K. (Roderick K.), 1939-

Electronic Access
: 
ScienceDirect https://www.sciencedirect.com/science/book/9780122341168
 
ScienceDirect https://www.sciencedirect.com/science/bookseries/07367031/16


Shelf NumberItem BarcodeShelf LocationShelf LocationHolding Information
TK7874 .V56 VOL. 161183706-1001Elsevier E-Book CollectionsElsevier E-Book Collections