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      by 
      Maluf, Nadim.
      Format: 
      Excerpt: 
      An introduction to microelectromechanical systems engineering Maluf, Nadim.
      by 
      Santos, Héctor J. de los.
      Format: 
      Excerpt: 
      Introduction to microelectromechanical microwave systems Santos, Héctor J. de los.
      by 
      National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
      Format: 
      Excerpt: 
      Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
      by 
      Cheung, Rebecca.
      Format: 
      Excerpt: 
      Silicon carbide microelectromechanical systems for harsh environments
      by 
      Nguyen, Nam-Trung, 1970-
      Format: 
      Excerpt: 
      MEMS--Microelectromechanical systems series
      by 
      Beeby, Stephen.
      Format: 
      Excerpt: 
      Artech House microelectromechanical systems (MEMS) series
      by 
      Santos, Héctor J. de los.
      Format: 
      Excerpt: 
      Artech House microelectromechanical systems (MEMS) series
      by 
      Yang, Bin (Associate professor), author.
      Format: 
      Excerpt: 
      Artech House microelectromechanical systems (MEMS) library
      by 
      Nabok, Alexei.
      Format: 
      Excerpt: 
      Microelectromechanical systems series.
      by 
      Tilli, Markku, editor.
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Materials.
      by 
      Lindroos, Veikko.
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Materials.
      by 
      Kraft, Michael.
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Industrial applications.