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Laser microfabrication : thin film processes and lithography
Title:
Laser microfabrication : thin film processes and lithography
Author:
Ehrlich, Daniel J.
ISBN:
9780080918020
Publication Information:
Boston : Academic Press, ©1989.
Physical Description:
1 online resource (xii, 587 pages) : illustrations
Contents:
Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu -- Laser-stimulated molecular processes on surfaces / T.J. Chuang -- Spectroscopy and photochemistry of gases, adsorbates, and liquids / M. Rothschild -- Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao -- Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao -- Laser etching / John J. Ritsko -- Laser deposition : energetics and chemical kinetics / R.L. Jackson [and others] -- Laser deposition : experimental approaches / J. Haigh and M.R. Aylett -- Epitaxy / S.J.C. Irvine -- Doping and oxidation / Ian W. Boyd.
Abstract:
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Subject Term:
Genre:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780122334306Available:*
Shelf Number | Item Barcode | Shelf Location | Status |
|---|---|---|---|
| TA1677 .L366 1989 | 1176523-1001 | Elsevier E-Book Collections | Searching... |
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