1. Ultraviolet Light -- 2. Ablation -- 3. The Excimer Laser -- 4. UV Materials Research -- 5. UV Optics and Coatings -- 6. UV Laser Cleaning -- 7. Annealing and Planarizing -- 8. Deep-UV Microlithography -- 9. Micromachining -- 10. UV Lasers in Medicine.
Abstract:
Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself; moving through the optics, sources, and systems; and concluding with detailed descriptions of applications in various fields.
