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Electron-beam-induced nanometer-scale deposition
Title:
Electron-beam-induced nanometer-scale deposition
Author:
Cividjian, Natalia, 1967-
ISBN:
9780080465357
9780120147854
9786610707485
9781280707483
Publication Information:
Amsterdam ; Boston : Elsevier Academic Press, ©2006.
Physical Description:
1 online resource (xv, 247 pages) : illustrations.
Series:
Advances in imaging and electron physics ; v. 143
Advances in imaging and electron physics ; v. 143.
Contents:
Introduction. -- Electron-beam-induced nanometer-scale deposition: a literature survey. -- The theory of EBID spatial resolution. -- The role of secondary electrons in EBID. -- Delocalization effects in EBID.
Abstract:
Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.
Genre:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780120147854 ScienceDirect http://www.sciencedirect.com/science/publication?issn=10765670&volume=143Available:*
Shelf Number | Item Barcode | Shelf Location | Status |
|---|---|---|---|
| T174.7 .E44 2006 EB | 1189268-1001 | Elsevier E-Book Collections | Searching... |
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