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Semiconductor safety handbook : safety and health in the semiconductor industry
Title:
Semiconductor safety handbook : safety and health in the semiconductor industry
Author:
Bolmen, Richard A.
ISBN:
9781591241515
9780080946542
Publication Information:
Westwood, N.J. : Noyes Publications, ©1998.
Physical Description:
1 online resource (xxiv, 610 pages) : illustrations.
Series:
Semiconductor safety series
Semiconductor safety series.
Contents:
Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies -- Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention -- Chemical Hazards in Semiconductor Operations -- Industrial Hygiene -- Electrical Hazards -- Radiation Safety -- Recognition, Evaluation and Control of Some Plasma Processing Hazards -- Fire Protection Technology for Semiconductor Operations -- Building and Fire Codes Impacting the Semiconductor Industry -- Gases and Gas Equipment -- Toxic Gas Monitoring -- References -- Index.
Abstract:
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in the semiconductor industry.
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Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815514183 ScienceDirect https://www.sciencedirect.com/science/book/9780815514183Available:*
Shelf Number | Item Barcode | Shelf Location | Status |
|---|---|---|---|
| TK7836 .S463 1998 EB | 1189955-1001 | Elsevier E-Book Collections | Searching... |
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