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Ion implantation and beam processing
Title:
Ion implantation and beam processing
Author:
Williams, James S. (James Stanislaus), 1948-
ISBN:
9781483220642
Publication Information:
Sydney ; New York : Academic Press, 1984.
Physical Description:
1 online resource (xi, 419 pages) : illustrations
Contents:
Introduction to implantation and beam processing / J.S. Williams, J.M. Poate -- Amorphization and crystallization of semiconductors / J.M. Poate, J.S. Williams -- Applications of the Boltzmann transport equation to ion implantation in semiconductors and multilayer targets / J.F. Gibbons, L.A. Christel -- High energy density collision cascades and spike effects / J.A. Davies -- Implantation of insulators: ices and lithographic materials / W.L. Brown -- Ion-bombardment-induced composition changes in alloys and compounds / Hans Henrik Andersen -- Ion beam and laser mixing: fundamentals and applications / B.R. Appleton -- High-does implantation / D.G. Beanland -- Trends of ion implantation in silicon technology / H.S. Rupprecht, A.E. Michel -- Implantation in Ga AS technology / F.H. Eisen -- Contracts and interconnections on semiconductors / J.E.E. Baglin, H.B. Harrison, J.L. Tandon [and others].
Abstract:
Ion Implantation and Beam Processing covers the scientific and technological advances in the fields of ion implantation and beam processing. The book discusses the amorphization and crystallization of semiconductors; the application of the Boltzmann transport equation to ion implantation in semiconductors and multilayer targets; and the high energy density collision cascades and spike effects. The text also describes the implantation of insulators (ices and lithographic materials); the ion-bombardment-induced compositions changes in alloys and compounds; and the fundamentals and applications of ion beam and laser mixing. The high-dose implantation and the trends of ion implantation in silicon technology are also considered. The book further tackles the implantation in gaAs technology and the contacts and interconnections on semiconductors. Engineers and people involved in microelectronics will find the book invaluable.
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Electronic Access:
ScienceDirect https://www.sciencedirect.com/science/book/9780127569802Available:*
Shelf Number | Item Barcode | Shelf Location | Status |
|---|---|---|---|
| QC702.7 .I55 I58 1984 | 1177646-1001 | Elsevier E-Book Collections | Searching... |
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