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Electron collisions with molecules in gases : applications to plasma diagnostics and modeling
Title:
Electron collisions with molecules in gases : applications to plasma diagnostics and modeling
Author:
Kimura, Mineo.
ISBN:
9780120038442
9781281046208
9786611046200
9780080526058
Publication Information:
San Diego : Academic Press, ©2001.
Physical Description:
1 online resource (xi, 315 pages) : illustrations.
Series:
Advances in atomic, molecular, and optical physics, 44
Advances in atomic, molecular, and optical physics ; 44.
General Note:
Sur la couv. : Electron collisions with molecules in gases: applications to plasma diagnostics and modeling ; Serial edited by Benjamin Bederson [and others].
Contient les sommaires des volumes 1-44.
Contents:
Front Cover; Advances in Atomic, Molecular and Optical Physics; Copyright Page; Contents; Contributors; Preface; Chapter 1. Mechanisms of Electron Transport in Electrical Discharges and Electron Collision Cross Sections; I. Introduction; II. Major Characteristics of Collisions and Reactions in Discharges and Plasmas; III. Cross Sections and Reaction Rate Constants of Atomic and Molecular Processes; IV. Measurements of Electron Collision Cross Sections and Illustrative Results; V. Measurements of Partial Cross Sections with the Use of the Appearance Potential in Mass Spectrometry
VI. Measurements of Cross Sections for the Production of Positive and Negative IonsVII. Outlook; VIII. Acknowledgments; IX. References; Chapter 2. Theoretical Consideration of Plasma-Processing Processes; I. Introduction; II. An Example of Electron-Molecule Scattering; III. Overview of Theoretical Framework; IV. Current Level of the Accuracy of Theoretical Approaches; V. Excited Species; VI. Perspective and Conclusion; VII. Acknowledgment; VIII. References; Chapter 3. Electron Collision Data for Plasma-Processing Gases; I. Introduction; II. Plasma-Processing Gases; III. Data Assessment
IV. Assessed Cross Sections and CoefficientsV. Boltzmann-Code-Generated Collision Cross-Section Sets; VI. Conclusions; VII. References; Chapter 4. Radical Measurements in Plasma Processing; I. Introduction; II. Summary of Recent Developments in Measurement Methods for Radicals in Plasma Processing; III. Details of in Situ Measurement Methods for Radicals in Processing Plasmas; IV. Representative Results of CFx and SiHx Radicals in Processing Plasmas; V. Conclusions; VI. References; Chapter 5. Radio-Frequency Plasma Modeling for Low-Temperature Processing; I. Introduction
II. Radio-Frequency Electron Transport TheoryIII. Modeling of Radio-Frequency Plasmas; IV. Conclusions; V. Acknowledgments; VI. References; Chapter 6. Electron Interactions with Excited Atoms and Molecules; I. Introduction; II. Electron Scattering from Excited Atoms; III. Electron-Impact Ionization of Excited Atoms; IV. Electron Scattering from Excited Molecules; V. Electron-Impact Ionization of Excited Molecules; VI. Electron Attachment to Excited Molecules; VII. Concluding Remarks; VIII. Acknowledgment; IX. Appendix A; X. References; Subject Index; Contents of Volumes in this Series
Abstract:
This series, established in 1965, is concerned with recent developments in the general area of atomic, molecular, and optical physics. The field is in a state of rapid growth, as new experimental and theoretical techniques are used on many old and new problems. Topics covered also include related applied areas, such as atmospheric science, astrophysics, surface physics, and laser physics. Articles are written by distinguished experts who are active in their research fields. The articles contain both relevant review material as well as detailed descriptions of important recent developments.
Genre:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780120038442Available:*
Shelf Number | Item Barcode | Shelf Location | Status |
|---|---|---|---|
| QC173 .A25432 V.44 EB | 1188772-1001 | Elsevier E-Book Collections | Searching... |
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