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      Cover image for Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
      1. 
      Cover image for A guide to hands-on MEMS design and prototyping
      2. 
      A guide to hands-on MEMS design and prototyping
      by 
      Kubby, Joel A.
      Click to View
      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for Digital holography for MEMS and microsystem metrology
      3. 
      Digital holography for MEMS and microsystem metrology
      by 
      Asundi, Anand.
      Click to View
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Measurement.
      Cover image for Trends in nano- and micro-cavities
      4. 
      Trends in nano- and micro-cavities
      by 
      Kwon, O'Dae.
      Click to View
      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore
      5. 
      NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore
      by 
      International Conference on Materials for Advanced Technologies (2011 : Singapore), issuing body.
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      Format: 
      Excerpt: 
      Microelectromechanical systems -- Congresses.
      Cover image for Nanotechnology an introduction
      6. 
      Nanotechnology an introduction
      by 
      Ramsden, Jeremy.
      ScienceDirect http://www.sciencedirect.com/science/book/9780080964478
      Format: 
      Excerpt: 
      microelectromechanical systems (MEMS) technology, is confronted with a bewildering range of information. This book brings
      Cover image for Nanotechnology : an introduction
      7. 
      Nanotechnology : an introduction
      by 
      Ramsden, Jeremy.
      ScienceDirect http://www.sciencedirect.com/science/book/9780323393119
      Format: 
      Excerpt: 
      microelectromechanical systems (MEMS) technology. This book brings together the principles, theory, and practice of
      Cover image for Nanotechnology : an introduction
      8. 
      Nanotechnology : an introduction
      by 
      Ramsden, Jeremy.
      ScienceDirect https://www.sciencedirect.com/science/book/9780080964478
      Format: 
      Excerpt: 
      microelectromechanical systems (MEMS) technology, is confronted with a bewildering range of information. This book brings
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