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      Cover image for MEMS for automotive and aerospace applications
      1. 
      MEMS for automotive and aerospace applications
      by 
      Kraft, Michael.
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      Format: 
      Excerpt: 
      Microelectromechanical systems -- Industrial applications.
      Cover image for Hermeticity testing of MEMS and microelectronic packages
      2. 
      Hermeticity testing of MEMS and microelectronic packages
      by 
      Costello, Suzanne, author.
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      Format: 
      Excerpt: 
      Microelectromechanical systems -- Testing.
      Cover image for Electromechanics and MEMS
      3. 
      Electromechanics and MEMS
      by 
      Jones, T. B. (Thomas Byron), 1944-
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      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for Reliability of MEMS testing of materials and devices
      4. 
      Reliability of MEMS testing of materials and devices
      by 
      Tabata, Osamu.
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      Format: 
      Excerpt: 
      Microelectromechanical systems -- Reliability.
      Cover image for Enabling technologies for MEMS and nanodevices advanced micro and nanosystems
      5. 
      Enabling technologies for MEMS and nanodevices advanced micro and nanosystems
      by 
      Baltes, Henry.
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      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for Practical guide to RF-MEMS
      6. 
      Practical guide to RF-MEMS
      by 
      Iannacci, Jacopo.
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      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for Micro-drops and digital microfluidics
      7. 
      Micro-drops and digital microfluidics
      by 
      Berthier, Jean.
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      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for Guide to state-of-the-art electron devices
      8. 
      Guide to state-of-the-art electron devices
      by 
      Burghartz, Joachim N.
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      Format: 
      Excerpt: 
      Systems (MEMS) 18.1 Introduction 18.2 The 1960's - First Micromachined Structures Envisioned 18.3 The 1970
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