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      Cover image for An introduction to microelectromechanical systems engineering
      1. 
      An introduction to microelectromechanical systems engineering
      by 
      Maluf, Nadim.
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      Format: 
      Excerpt: 
      An introduction to microelectromechanical systems engineering Maluf, Nadim.
      Cover image for Analysis and design principles of MEMS devices
      2. 
      Analysis and design principles of MEMS devices
      by 
      Bao, Min-Hang.
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      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for Microjoining and nanojoining
      3. 
      Microjoining and nanojoining
      by 
      Zhou, Y.
      ScienceDirect http://www.sciencedirect.com/science/book/9781845691790
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Design and construction.
      Cover image for 4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France
      4. 
      4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France
      by 
      International Conference on Multi-Material Micro Manufacture (2nd : 2006 : Grenoble, France)
      ScienceDirect http://www.sciencedirect.com/science/book/9780080452630
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Congresses.
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