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      Cover image for Resonant MEMS : fundamentals, implementation and application
      1. 
      Resonant MEMS : fundamentals, implementation and application
      by 
      Brand, Oliver, editor.
      Click to View
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Design and construction.
      Cover image for Fabrication and design of resonant microdevices
      2. 
      Fabrication and design of resonant microdevices
      by 
      Bahreyni, Behraad.
      ScienceDirect http://www.sciencedirect.com/science/book/9780815515777
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Design and construction.
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