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      Cover image for Thin films by chemical vapour deposition
      1. 
      Thin films by chemical vapour deposition
      by 
      Moroșanu, C. E.
      ScienceDirect https://www.sciencedirect.com/science/book/9780444988010
      Format: 
      Excerpt: 
      Calculations in CVD Systems; 4.4 Examples of Thermodynamic Studies of CVD Systems; CHAPTER 5. KINETICS OF CVD