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      Cover image for Physico-chemical phenomena in thin films and at solid surfaces.
      1. 
      Physico-chemical phenomena in thin films and at solid surfaces.
      by 
      Trakhtenberg, L. I. (Leonid Izraĭlevich)
      ScienceDirect http://www.sciencedirect.com/science/book/9780123725233
      Format: 
      Excerpt: 
      Radiationless Transitions, Michitoshi Hayashi, Aleksandr M. Mebel, and Sheng H. Lin -- Part II. Physico-Chemical
      Cover image for Materials science of thin films : deposition and structure
      2. 
      Materials science of thin films : deposition and structure
      by 
      Ohring, Milton, 1936-
      ScienceDirect https://www.sciencedirect.com/science/book/9780125249751
      Format: 
      Excerpt: 
      -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics
      Cover image for Thin films by chemical vapour deposition
      3. 
      Thin films by chemical vapour deposition
      by 
      Moroșanu, C. E.
      ScienceDirect https://www.sciencedirect.com/science/book/9780444988010
      Format: 
      Excerpt: 
      Calculations in CVD Systems; 4.4 Examples of Thermodynamic Studies of CVD Systems; CHAPTER 5. KINETICS OF CVD