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      Cover image for Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS
      1. 
      Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS
      by 
      Adachi, Hideaki.
      ScienceDirect http://www.sciencedirect.com/science/book/9781437734836
      Format: 
      Excerpt: 
      -medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that