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      Cover image for Demystifying chipmaking
      1. 
      Demystifying chipmaking
      by 
      Yanda, Richard F.
      ScienceDirect http://www.sciencedirect.com/science/book/9780750677608
      Format: 
      Excerpt: 
      -- Silicon Nitride deposition -- Photolithography for photo/etch -- From trenches in silicon dioxide