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      Cover image for Dry etching for microelectronics
      1. 
      Dry etching for microelectronics
      by 
      Powell, Ronald A.
      ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
      Format: 
      Excerpt: 
      Dry etching for microelectronics / Powell, Ronald A.
      Cover image for PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
      2. 
      PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
      by 
      Powell, Ronald A.
      ScienceDirect http://www.sciencedirect.com/science/book/9780125330268
      ScienceDirect http://www.sciencedirect.com/science/bookseries/10794050/26
      Format: 
      Excerpt: 
      PVD for microelectronics : sputter deposition applied to semiconductor manufacturing / Powell