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      Cover image for Dry etching for microelectronics
      1. 
      Dry etching for microelectronics
      by 
      Powell, Ronald A.
      ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
      Format: 
      Excerpt: 
      Dry etching for microelectronics / Powell, Ronald A.
      Cover image for Advances in electronics and electron physics. Volume 62
      2. 
      Advances in electronics and electron physics. Volume 62
      by 
      Hawkes, P. W.
      ScienceDirect http://www.sciencedirect.com/science/book/9780120146628
      Format: 
      Excerpt: 
      TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.
      Cover image for Ion implantation and beam processing
      3. 
      Ion implantation and beam processing
      by 
      Williams, James S. (James Stanislaus), 1948-
      ScienceDirect https://www.sciencedirect.com/science/book/9780127569802
      Format: 
      Excerpt: 
      interconnections on semiconductors. Engineers and people involved in microelectronics will find the book invaluable.