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      Cover image for PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
      1. 
      PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
      by 
      Powell, Ronald A.
      ScienceDirect http://www.sciencedirect.com/science/book/9780125330268
      ScienceDirect http://www.sciencedirect.com/science/bookseries/10794050/26
      Format: 
      Excerpt: 
      PVD for microelectronics : sputter deposition applied to semiconductor manufacturing / Powell
      Cover image for Handbook of low and high dielectric constant materials and their applications
      2. 
      Handbook of low and high dielectric constant materials and their applications
      by 
      Nalwa, Hari Singh, 1954-
      ScienceDirect http://www.sciencedirect.com/science/book/9780125139052
      ScienceDirect https://www.sciencedirect.com/science/book/9780125139052
      Format: 
      Excerpt: 
      Recent developments in microelectronics technologies have created a great demand for interlayer