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      Cover image for Silicon carbide micro electromechanical systems for harsh environments
      1. 
      Silicon carbide micro electromechanical systems for harsh environments
      by 
      Cheung, Rebecca.
      Click to View
      Format: 
      Excerpt: 
      Silicon carbide microelectromechanical systems for harsh environments
      Cover image for Smart mems and sensor systems
      2. 
      Smart mems and sensor systems
      by 
      Gaura, Elena.
      Click to View
      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for MEMS : a practical guide to design, analysis, and applications
      3. 
      MEMS : a practical guide to design, analysis, and applications
      by 
      Korvink, J. G. (Jan G.)
      ScienceDirect https://www.sciencedirect.com/science/book/9780815514978
      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for Fundamentals and applications of microfluidics
      4. 
      Fundamentals and applications of microfluidics
      by 
      Nguyen, Nam-Trung, 1970-
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      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for 4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France
      5. 
      4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France
      by 
      International Conference on Multi-Material Micro Manufacture (2nd : 2006 : Grenoble, France)
      ScienceDirect http://www.sciencedirect.com/science/book/9780080452630
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Congresses.