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      Cover image for NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore
      1. 
      NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore
      by 
      International Conference on Materials for Advanced Technologies (2011 : Singapore), issuing body.
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      Format: 
      Excerpt: 
      Nanoelectromechanical systems -- Congresses.
      Cover image for Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
      2. 
      Cover image for Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine
      3. 
      Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine
      by 
      International Workshop on Semiconductor-on-Insulator Materials and Devices (6th : 2010 : Kiev, Ukraine), issuing body.
      Click to View
      Format: 
      Excerpt: 
      Nanoelectromechanical systems -- Congresses.