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by
Song, Yang, author.
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use in micro-electro-mechanical systems (MEMS) because it includes several laboratory functions on a
by
Ng, Jimmy, author.
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structures have potential applications in micro-electromechanical systems (MEMS). This dissertation serves as
by
Han, Ruirui, author.
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Te3) and advanced MEMS (Microelectromechanical systems) thin film techniques were used for the
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