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      by 
      Ohring, Milton, 1936-
      Format: 
      Excerpt: 
      -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics
      by 
      Francombe, Maurice H.
      Format: 
      Excerpt: 
      -Temperature Growth. Growth Systems. Surface Reactions. Kinetics ofLayer Growth- Hybride Reactants. Kinetics of Layer