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      Cover image for Optical diagnostics for thin film processing
      1. 
      Optical diagnostics for thin film processing
      by 
      Herman, Irving P.
      ScienceDirect http://www.sciencedirect.com/science/book/9780123420701
      ScienceDirect https://www.sciencedirect.com/science/book/9780123420701
      Format: 
      Excerpt: 
      OpticalProbes. Survey of Nonoptical Probes. Thin Film Processes and Their Diagnostics Needs. The Properties of