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2002
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      Cover image for Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications
      1. 
      Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications
      by 
      Seshan, Krishna.
      ScienceDirect http://www.sciencedirect.com/science/book/9780815514428
      Format: 
      Excerpt: 
      -- Chemical Vapor Deposition of Silicon Dioxide Films -- Metal Organic Chemical Vapor Deposition -- Feature