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      Cover image for Lithography for VLSI
      1. 
      Lithography for VLSI
      by 
      Einspruch, Norman G.
      ScienceDirect https://www.sciencedirect.com/science/book/9780122341168
      ScienceDirect https://www.sciencedirect.com/science/bookseries/07367031/16
      Format: 
      Excerpt: 
      Integrated circuits -- Very large scale integration.
      Cover image for Fine line lithography
      2. 
      Fine line lithography
      by 
      Newman, Roger.
      ScienceDirect http://www.sciencedirect.com/science/book/9780444853516
      Format: 
      Excerpt: 
      Integrated circuits -- Large scale integration.