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      by 
      Jones, T. B. (Thomas Byron), 1944-
      Format: 
      Excerpt: 
      piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D
      by 
      Bao, Min-Hang.
      Format: 
      Excerpt: 
      , vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems