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      Cover image for An introduction to microelectromechanical systems engineering
      1. 
      An introduction to microelectromechanical systems engineering
      by 
      Maluf, Nadim.
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      An introduction to microelectromechanical systems engineering Maluf, Nadim.
      Cover image for Introduction to microelectromechanical microwave systems
      2. 
      Introduction to microelectromechanical microwave systems
      by 
      Santos, Héctor J. de los.
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      Excerpt: 
      Introduction to microelectromechanical microwave systems Santos, Héctor J. de los.
      Cover image for Silicon carbide micro electromechanical systems for harsh environments
      3. 
      Silicon carbide micro electromechanical systems for harsh environments
      by 
      Cheung, Rebecca.
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      Excerpt: 
      Silicon carbide microelectromechanical systems for harsh environments
      Cover image for MEMS mechanical sensors
      4. 
      MEMS mechanical sensors
      by 
      Beeby, Stephen.
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      Excerpt: 
      Artech House microelectromechanical systems (MEMS) series
      Cover image for RF MEMS circuit design for wireless communications
      5. 
      RF MEMS circuit design for wireless communications
      by 
      Santos, Héctor J. de los.
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      Format: 
      Excerpt: 
      Artech House microelectromechanical systems (MEMS) series
      Cover image for Handbook of silicon based MEMS materials and technologies
      6. 
      Handbook of silicon based MEMS materials and technologies
      by 
      Tilli, Markku, editor.
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      Excerpt: 
      Microelectromechanical systems -- Materials.
      Cover image for Handbook of silicon based MEMS materials and technologies
      7. 
      Handbook of silicon based MEMS materials and technologies
      by 
      Lindroos, Veikko.
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      Excerpt: 
      Microelectromechanical systems -- Materials.
      Cover image for MEMS for automotive and aerospace applications
      8. 
      MEMS for automotive and aerospace applications
      by 
      Kraft, Michael.
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      Format: 
      Excerpt: 
      Microelectromechanical systems -- Industrial applications.
      Cover image for Handbook of silicon based MEMS : materials & technologies
      9. 
      Handbook of silicon based MEMS : materials & technologies
      by 
      Lindroos, Veikko.
      ScienceDirect http://www.sciencedirect.com/science/book/9780815515944
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Materials.
      Cover image for Hermeticity testing of MEMS and microelectronic packages
      10. 
      Hermeticity testing of MEMS and microelectronic packages
      by 
      Costello, Suzanne, author.
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      Excerpt: 
      Microelectromechanical systems -- Testing.
      Cover image for Understanding MEMS : principles and applications
      11. 
      Understanding MEMS : principles and applications
      by 
      Castañer, Luis, author.
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      Format: 
      Excerpt: 
      Microelectromechanical systems.
      Cover image for On-chip pretreatment of whole blood by using MEMS technology
      12. 
      On-chip pretreatment of whole blood by using MEMS technology
      by 
      Chen, Xing.
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      Excerpt: 
      Microelectromechanical systems.
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