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      Cover image for Enabling technologies for MEMS and nanodevices advanced micro and nanosystems
      1. 
      Cover image for 4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France
      2. 
      4M2006 : Second International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France
      by 
      International Conference on Multi-Material Micro Manufacture (2nd : 2006 : Grenoble, France)
      ScienceDirect http://www.sciencedirect.com/science/book/9780080452630
      Format: 
      Excerpt: 
      TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.
      Cover image for Analysis and design principles of MEMS devices
      3. 
      Analysis and design principles of MEMS devices
      by 
      Bao, Min-Hang.
      ScienceDirect https://www.sciencedirect.com/science/book/9780444516169
      Format: 
      Excerpt: 
      TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.
      Cover image for Hermeticity testing of MEMS and microelectronic packages
      4. 
      Hermeticity testing of MEMS and microelectronic packages
      by 
      Costello, Suzanne, author.
      Click to View
      Format: 
      Excerpt: 
      Microelectronics -- Testing.
      Cover image for Micro mechanical systems : principles and technology
      5. 
      Micro mechanical systems : principles and technology
      by 
      Fukuda, T. (Toshio), 1948-
      ScienceDirect http://www.sciencedirect.com/science/book/9780444823632
      ScienceDirect http://www.sciencedirect.com/science/publication?issn=13862766&volume=6
      ScienceDirect http://www.sciencedirect.com/science/handbooks/13862766/6
      Format: 
      Excerpt: 
      . Section one is a general introduction to the historical background and the parallels to microelectronics