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      Cover image for Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
      1. 
      Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
      by 
      National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
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      Format: 
      Excerpt: 
      Microelectronics -- Materials.
      Cover image for The handbook of nanotechnology business, policy, and intellectual property law
      2. 
      The handbook of nanotechnology business, policy, and intellectual property law
      by 
      Miller, John C.
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      Format: 
      Excerpt: 
      Microelectronics industry.