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      by 
      Costello, Suzanne, author.
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Testing.
      by 
      Baltes, Henry.
      Format: 
      Excerpt: 
      Microelectromechanical systems.
      by 
      Zhou, Y.
      Format: 
      Excerpt: 
      Microelectromechanical systems -- Design and construction.