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      Cover image for Laser microfabrication : thin film processes and lithography
      1. 
      Laser microfabrication : thin film processes and lithography
      by 
      Ehrlich, Daniel J.
      ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
      Format: 
      Excerpt: 
      . Haigh and M.R. Aylett -- Epitaxy / S.J.C. Irvine -- Doping and oxidation / Ian W. Boyd.