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      Cover image for Nanolithography and patterning techniques in microelectronics
      1. 
      Nanolithography and patterning techniques in microelectronics
      by 
      Bucknall, David G.
      ScienceDirect http://www.sciencedirect.com/science/book/9781855739314
      Format: 
      Excerpt: 
      Prelium; Contents; Block copolymer nanolithography; Surface-induced structure formation of polymer