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      Cover image for Handbook of VLSI microlithography : principles, technology, and applications
      1. 
      Handbook of VLSI microlithography : principles, technology, and applications
      by 
      Helbert, John N.
      ScienceDirect http://www.sciencedirect.com/science/book/9780815514442
      Format: 
      Excerpt: 
      Integrated circuits -- Very large scale integration.
      Cover image for Handbook of VLSI microlithography : principles, technology, and applications
      2. 
      Handbook of VLSI microlithography : principles, technology, and applications
      by 
      Glendinning, William B.
      ScienceDirect http://www.sciencedirect.com/science/book/9780815512813
      Format: 
      Excerpt: 
      Integrated circuits -- Very large scale integration.