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      Cover image for Plasma etching processes for interconnect realization in VLSI
      1. 
      Plasma etching processes for interconnect realization in VLSI
      by 
      Posseme, Nicolas, editor.
      Click to View
      Format: 
      Excerpt: 
      Integrated circuits -- Very large scale integration.
      Cover image for Dry etching for microelectronics
      2. 
      Dry etching for microelectronics
      by 
      Powell, Ronald A.
      ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
      Format: 
      Excerpt: 
      Electronic equipment Integrated circuits Construction Methods