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      Cover image for Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications
      1. 
      Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications
      by 
      Seshan, Krishna.
      ScienceDirect http://www.sciencedirect.com/science/book/9780815514428
      Format: 
      Excerpt: 
      Metallization of Integrated Circuits -- Performance, Processing, and Lithography Trends -- Index.
      Cover image for Ionized physical vapor deposition
      2. 
      Ionized physical vapor deposition
      by 
      Hopwood, Jeffrey A.
      ScienceDirect http://www.sciencedirect.com/science/book/9780125330275
      ScienceDirect http://www.sciencedirect.com/science/bookseries/10794050/27
      Format: 
      Excerpt: 
      of today's complex integrated circuits. Out of this research, ionized physical vapor deposition has
      Cover image for Handbook of thin film materials
      3. 
      Handbook of thin film materials
      by 
      Nalwa, Hari Singh, 1954-
      ScienceDirect http://www.sciencedirect.com/science/book/9780125129084
      ScienceDirect https://www.sciencedirect.com/science/book/9780125129084
      Format: 
      Excerpt: 
      Very Large Scale Integration (VLSI) Integrated Circuits -- 2 High Permittivity (Ba, Sr)TiO3 Thin Films