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Subject: Transducers.
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Bao, Min-Hang.
ScienceDirect http://www.sciencedirect.com/science/book/9780444505583
ScienceDirect http://www.sciencedirect.com/science/handbooks/13862766/8
ScienceDirect http://www.sciencedirect.com/science/handbooks/13862766/8
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Microelectromechanical systems -- Handbooks, manuals, etc.
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