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by
Karkisaval Ganapati, Abhijith, author.
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and accurate diagnosis. Mass based micro-electromechanical systems (MEMS) biosensors, with increasing
by
Song, Yang, author.
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use in micro-electro-mechanical systems (MEMS) because it includes several laboratory functions on a
by
Li, Meng, author.
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extensive use of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) in sensors
by
Ng, Jimmy, author.
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structures have potential applications in micro-electromechanical systems (MEMS). This dissertation serves as
by
Han, Ruirui, author.
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Te3) and advanced MEMS (Microelectromechanical systems) thin film techniques were used for the
by
Wen, Ximiao, author.
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development of microelectromechanical systems (MEMS) in the past few decades, a great amount of efforts has
by
Luo, Sijun, author.
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Excerpt:
essential for their practical integration in portable electronics and microelectromechanical systems that
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