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      Cover image for An introduction to microelectromechanical systems engineering
      1. 
      An introduction to microelectromechanical systems engineering
      by 
      Maluf, Nadim.
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      An introduction to microelectromechanical systems engineering Maluf, Nadim.
      Cover image for Introduction to microelectromechanical microwave systems
      2. 
      Introduction to microelectromechanical microwave systems
      by 
      Santos, Héctor J. de los.
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      Excerpt: 
      Introduction to microelectromechanical microwave systems Santos, Héctor J. de los.
      Cover image for Microelectromechanical systems advanced materials and fabrication methods
      3. 
      Microelectromechanical systems advanced materials and fabrication methods
      by 
      National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
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      Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
      Cover image for Silicon carbide micro electromechanical systems for harsh environments
      4. 
      Silicon carbide micro electromechanical systems for harsh environments
      by 
      Cheung, Rebecca.
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      Silicon carbide microelectromechanical systems for harsh environments
      Cover image for Fundamentals and applications of microfluidics
      5. 
      Fundamentals and applications of microfluidics
      by 
      Nguyen, Nam-Trung, 1970-
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      Excerpt: 
      MEMS--Microelectromechanical systems series
      Cover image for MEMS mechanical sensors
      6. 
      MEMS mechanical sensors
      by 
      Beeby, Stephen.
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      Excerpt: 
      Artech House microelectromechanical systems (MEMS) series
      Cover image for RF MEMS circuit design for wireless communications
      7. 
      RF MEMS circuit design for wireless communications
      by 
      Santos, Héctor J. de los.
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      Excerpt: 
      Artech House microelectromechanical systems (MEMS) series
      Cover image for Organic and inorganic nanostructures
      8. 
      Organic and inorganic nanostructures
      by 
      Nabok, Alexei.
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      Excerpt: 
      Microelectromechanical systems series.
      Cover image for Handbook of silicon based MEMS materials and technologies
      9. 
      Handbook of silicon based MEMS materials and technologies
      by 
      Lindroos, Veikko.
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      Excerpt: 
      Microelectromechanical systems -- Materials.
      Cover image for On-chip pretreatment of whole blood by using MEMS technology
      10. 
      On-chip pretreatment of whole blood by using MEMS technology
      by 
      Chen, Xing.
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      Excerpt: 
      Microelectromechanical systems.
      Cover image for Introduction to microfabrication
      11. 
      Introduction to microfabrication
      by 
      Franssila, Sami.
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      Excerpt: 
      Microelectromechanical systems.
      Cover image for Micro, nanosystems, and systems on chips modeling, control, and estimation
      12. 
      Micro, nanosystems, and systems on chips modeling, control, and estimation
      by 
      Voda, Alina.
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      Microelectromechanical systems.
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