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Subject: Mechanical engineering.
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Regtien, P. P. L., author.
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Microelectromechanical systems.
by
Regtien, P. P. L.
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Microelectromechanical systems.
by
Karkisaval Ganapati, Abhijith, author.
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and accurate diagnosis. Mass based micro-electromechanical systems (MEMS) biosensors, with increasing
by
Ng, Jimmy, author.
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structures have potential applications in micro-electromechanical systems (MEMS). This dissertation serves as
by
Han, Ruirui, author.
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Te3) and advanced MEMS (Microelectromechanical systems) thin film techniques were used for the
by
Wen, Ximiao, author.
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development of microelectromechanical systems (MEMS) in the past few decades, a great amount of efforts has
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