Search Results for Microelectromechanical systems. - Narrowed by: Microelectromechanical systems
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2026-01-27T06:18:07Z
Handbook of silicon based MEMS : materials & technologies
ent://SD_ILS/0/SD_ILS:1193237
2026-01-27T06:18:07Z
2026-01-27T06:18:07Z
by Lindroos, Veikko.<br/>ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780815515944">http://www.sciencedirect.com/science/book/9780815515944</a><br/>Format: Electronic Resources<br/>