Search Results for Microelectromechanical systems. - Narrowed by: Solid state physics. SirsiDynix Enterprise http://katalog.baskent.edu.tr/client/en_US/default/default/qu$003dMicroelectromechanical$002bsystems.$0026qf$003dSUBJECT$002509Subject$002509Solid$002bstate$002bphysics.$002509Solid$002bstate$002bphysics.$0026ps$003d300?dt=list 2026-09-19T06:34:49Z Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications ent://SD_ILS/0/SD_ILS:1020651 2026-09-19T06:34:49Z 2026-09-19T06:34:49Z by&#160;Madou, Marc J., author.<br/><a href="https://ebookcentral.proquest.com/lib/baskent-ebooks/detail.action?docID=1446478">Click to View</a><br/>Format:&#160;Electronic Resources<br/>