Atomic layer deposition principles, characteristics, and nanotechnology applications
Başlık:
Atomic layer deposition principles, characteristics, and nanotechnology applications
Yazar:
Kaariainen, Tommi.
Yayın Bilgileri:
Hoboken, NJ : John Wiley & Sons, c2013.
Fiziksel Tanımlama:
xv, 253 p. : ill.
