Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
Başlık:
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
Yazar:
Madou, Marc J., author.
Basım Bilgisi:
Third edition.
Fiziksel Tanımlama:
1 online resource (642 pages) : illustrations (some color), tables
Notlar:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
