Sputtering materials for VLSI and thin film devices
Başlık:
Sputtering materials for VLSI and thin film devices
Basım Bilgisi:
First edition.
Fiziksel Tanımlama:
1 online resource (614 pages) : illustrations
Notlar:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
