Microelectromechanical systems advanced materials and fabrication methods
Başlık:
Microelectromechanical systems advanced materials and fabrication methods
Yazar:
National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
Tüzel Kişi Adı Yazar Girişi:
Yayın Bilgileri:
Washington, DC : National Academy Press, 1997.
Fiziksel Tanımlama:
xiv, 61 p. : ill.
