Advances in chemical mechanical planarization (CMP)
Başlık:
Advances in chemical mechanical planarization (CMP)
Yazar:
Babu, Suryadevara, editor.
Fiziksel Tanımlama:
1 online resource (538 pages) : illustrations (some color).
Seri:
Woodhead Publishing Series in Electronic and Optical Materials ; Number 86
Woodhead Publishing series in electronic and optical materials ; Number 86.
Notlar:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
