
Ion implantation in semiconductors, silicon and germanium
Başlık:
Ion implantation in semiconductors, silicon and germanium
Yazar:
Mayer, James W., 1930-
ISBN:
9780124808508
9780323157216
Yayın Bilgileri:
New York, Academic Press, 1970.
Fiziksel Tanımlama:
1 online resource (xiii, 280 pages) illustrations