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Plasma deposition, treatment, and etching of polymers
Başlık:
Plasma deposition, treatment, and etching of polymers
Yazar:
D'Agostino, Riccardo.
ISBN:
9780323139083
Yayın Bilgileri:
Boston : Academic Press, ©1990.
Fiziksel Tanımlama:
1 online resource (xiii, 528 pages) : illustrations.
Seri:
Plasma--materials interactions
Plasma--materials interactions.
İçerik:
Front Covver; Plasma Deposition, Treatment, and Etching of Polymers; Copyright Page; Table of Contents; Contributors; Preface; Chapter 1. An Introduction to Plasma Polymerization; I. Introduction; II. Control of Plasma Polymer Thin Film Properties; III. Methods of Plasma Polymer Characterization; IV. Applications of Plasma Polymer Films; References; Chapter 2. Plasma Polymerization of Fluorocarbons; I. Comparison of Gas Feeds; II. Simplifying Parameters; III. Reactors; IV. Gas Phase Diagnostics; V. Mechanism of Deposition of PPFM Films
VI. Chemical Structure of PPFM Films and Their Correlation to Gas Phase Species DistributionReferences; Chapter 3. Plasma-Polymerized Organosilieones and Organometallics; I. Introduction; II. Effect of Fabrication Variables; III. Plasma Polymerization Mechanisms; IV. The Structure of Plasma Polymer Films; V. Morphology of Plasma Polymer Films; VI. Properties of Plasma Polymer Films; VII. Applications of Plasma Polymer Films; VIII. Conclusions; IX. Addendum; Acknowledgments; References; Chapter 4. Plasma Polymer-Metal Composite Films; I. Introduction
II. Vacuum Techniques for Deposition of Polymer/Metal Composite FilmsIII. Elementary Processes Involved in the Deposition; IV. Structure and Composition of Films; V. Optical Properties; VI. Electrical Properties; VII. Mechanical Properties; VIII. Aging Effects and Stability of the Films; IX. Applications; X. Conclusions; Acknowledgments; References; Chapter 5. Plasma Etching of Organic Polymers; I. Introduction; II. Plasma Sources and Diagnostics; III. Hydrocarbon Polymer Etching Using Oxygen Plasmas; IV. Hydrocarbon Polymer Etching in Plasmas of Oxygen and Fluorine Containing Gases
V. Fluoropolymer EtchingVI. Effect of Ion Bombardment; VII. Loading Effect; VIII. Temperature Dependence; IX. Other Gases Added to O 2; X. Etch Products; XI. More on Polymer Structure; XII. Applications; Acknowledgments; References; Chapter 6. Applications of Plasma Polymers; I. Introduction; II. Plasma Polymerized Resists in Microfabrication Processes; III. Plasma Polymers in Electronic Elements; IV. Plasma Polymers in Optical Applications; V. Diamond and Amorphous Carbon Synthesis; References; Chapter 7. Plasma Deposition and Treatment for Biomaterial Applications; I. Introduction
II. Blood Compatibility of Plasma-Deposited FilmsIII. Ophthalmological Applications; IV. Tissue Culture Applications; V. Membranes and Drug Delivery Devices; VI. Plasma Cleaning of Biomaterial Surfaces; VII. Plasma Sterilization; VIII. Biomedical Electrodes and Implanted Sensors; IX. Conclusions; Acknowledgments; References; Index
Özet:
Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the interaction of plasmas with polymer surfaces. This recent technology has yielded a large class of new materials offering many applications, including their use as coatings for chemical fibers and films. Additional applications include uses for the passivation of metals, the surface hardening of tools, increased biocompatibility of biomedical materials, chemical and physical sensors, and a variety of micro- and optoelectronic devices. Key Features * Appeals to a broad range of industries from microelectronics to space technology * Discusses a wide array of new uses for plasma polymers * Provides a tutorial introduction to the field * Surveys various classes of plasma polymers, their chemical and morphological properties, effects of plasma process parameters on the growth and structure of these synthetic materials, and techniques for characterization * Interests scientists, engineers, and students alike.
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Elektronik Erişim:
ScienceDirect http://www.sciencedirect.com/science/book/9780122004308Mevcut:*
Yer Numarası | Demirbaş Numarası | Shelf Location | Lokasyon / Statüsü / İade Tarihi |
|---|---|---|---|
| TA455 .P58 P58 1990 | 1178978-1001 | Elsevier E-Kitap Koleksiyonu | Arıyor... |
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